介紹一種新穎的雙針表面形貌測量系統,它將光學位移傳感器和觸針位移傳感器巧妙地結
合在一起,從而具有接觸和非接觸兩種測量手段。與單一測量模式的表面形貌測量儀器相比,它的性能 價格比更高,應用范圍更廣。該測量系統已投入實用,接觸測量模式下其垂直測量范圍和垂直分辨率分別是1 mm和10 nm,非接觸測量模式下分別是500μm和3 nm。實踐證實,該系統使用靈活,可靠性高。
關鍵詞: 表面形貌; 接觸P非接觸測量; 表面特征提取
Abstract : A dual2stylus surface measurement instrument , developed for the characterization of engineering sur2 faces , is presented. The instrument is of a hybrid type and is capable of contact and non2contact measurement , mak2 ing it suitable for a wider range of applications. It has an optical displacement sensor and a stylus displacement sen2 sor. For contact measurement , the vertical measurement range and resolution of the instrument are 1 mm and 10 nm , respectively. For non2contact measurement , they are 500μm and 3 nm , respectively. The instrument has been suc2 cessfully used for several forensic applications , demonstrating its unique flexibility and high reliability as a novel sur2 face topography instrument.
Key words : Surface topography ; ContactPnon2contact measurement ; Surface characterization