Description
The Agilent10716A High Resolution Interferometer (see Figure7H-1)
offers twice the resolution of conventional plane mirror interferometers
and has the same excellent thermal characteristics as the
Agilent10706B interferometer (typically, only 0.04micron of drift per
degree C). Measurement drift is typically 1/12 of that exhibited by a
conventional plane mirror interferometer. These features result in
improved accuracy, repeatability, and positioning capability.
Although the Agilent10716A interferometer is larger than the
conventional plane mirror interferometer and the slew rate is halved,
the finer resolution of this optic allows laser measurement system
measurement resolution of 2.5nanometers (0.1microinch) with most
Agilent laser electronics.