介紹了一種新型金剛石高溫壓力傳感器的優化設計方法。采用薄板彎曲理論研究了均勻載荷作用下多晶金剛石方膜在小撓度和大撓度下的應變分布情況。對設計時應當考慮的主要問題包括金剛石力敏電阻條的摻雜濃度,電橋的形式,電阻條在膜片上的分布以及電阻條的有效長度和形狀等進行了討論。利用模擬程序確定了力敏電阻條的最優有效長度,分析了敏感膜片厚度,方塊電阻等因素對電阻條有效長度和輸出響應的影響。
關鍵詞: 金剛石; 壓力傳感器; 靈敏度; 優化設計
Abstract :Optimum design considerations for poly2diamond piezoresistive pressure sensors are demonstrated. The strain distribution based on small and large deflection theories of diamond square diaphragm was studied using theories of plate bend. Some main problems which should be taken into account during design , including the dopant concentration of resistors ,the configuration of Wheatstone bridge ,the arrangement of resistors on square
diaphragm and the effective length and shape of resistors , were discussed. The optimum effective length of resis2 tors has been calculated by a simulation program ,and the effects of thickness of square diaphragm and sheet resis2 tance on the effective length and output responses were analyzed.
Key Words :diamond ; pressure sensor ; sensitivity ; optimum design