微器件自動裝配系統的定標和操縱設計

主要研究了自動微器件裝配系統的定標技術和操縱策略兩個問題. 在加入了尺度因子優化步驟之后,一種基于Tsai 兩步法的自定標方法實現了亞微米級的定標精度,并且獲得了更加可信的定標角度參數. 這種定標方法應用于微器件裝配系統中并可以實現高精度的微器件定位. 除了精確定標之外,我們還應該選擇合適的工作環境來控制粘附力的大小來提高微器件操縱成功率,選擇合適的夾持和釋放方式來提高微器件操縱效率和釋放位置精度,選擇一種安全簡單的移動路徑來縮短移動時間. 實驗表明,我們的自動微器件裝配系統可以在10 s 內完成一個器件的定位和移動操作,并實現數微米的釋放位置精度.

:An automated micro assembly system is presented here. A new self2calibration method with scale factor optimization steps based on Tsai ’s two stage algorithm is applied to calibrate our system. Sub2micron in plane cali bration accuracy and more believable calibration angles can be achieved by our calibration method. A suitable envi2 ronment may facilitate the handling operation because the adhesion forces between micro object s are affected by en vironmental parameters obviously. The pick and release strategies also affect the handling efficiency and micro ob ject positioning accuracy. More attention should be paid on them. Our automated micro assembly system can locate and handle a micro part within 10 seconds with a positioning accuracy of several microns.