大功率汞燈電源測控系統研究

2512792 2010-11-22 | rar | 1563 | 次下載 | 5積分

資料介紹

為確保大功率汞燈曝光系統能夠穩定、安全可靠地運行，設計了一套較為完善的汞燈電源測控系統。采用適合強電磁干擾環境下的磁平衡電壓電流傳感器及相應信號處理電路；選用基于鉑熱電阻傳感器Pt100的三線制恒電流激勵溫度信號檢測線路；采用高線性光耦HCNR200構成模擬信號高電壓隔離放大器輸出控制信號；采用模擬PID控制與數字控制相結合的方式實現恒電流、恒功率控制；給出了采用模擬乘法器計算功率信號并進行負載線路功率損耗補償的方法。實驗結果表明，該系統恒電流控制穩定性達±0.05%，恒功率控制穩定性達±0.5%。

Abstract:: ?For ensure stability， credibility and safety of exposure system for high power mercury lamp， perfect relatively power supply system on measuring and controlling for mercury lamp was designed. Magnetism balance voltage and current sensor and it’s signal disposal circuit in the condition of strong electromagnetism turbing were adopted， temperature signal detect circuitry powered by three lines constant current and based platinum resistance sensor Pt100 was selected， analog controlling signal outputted by high voltage insulation and amplifier constituted by high linearity light-coupling HCNR200 was adopted， at the same time， the constant current and power were achieved by associative controlling mode of analog PID and digital， finally， the system adopted simulation multiplication to calculate power signal and introduced the method on power wastage compensatory for load circuitry. Experiment result indicates that the constant current stability reaches ±0.05%，and constant power stability reaches ±0.5%.