現代檢測與補償技術越來越要求測量的高精度和實時性, 通過直接獲取運動誤差以避免
誤差殘留的二次相移三點法, 為運動誤差的在線高精度檢測提供了一條有效途徑. 通過對3 個傳感器的測量數據按照二次相移原則進行數據重組, 在數據處理的首次操作時消除直線形狀誤差的影響, 從而在反濾波基礎上可以先行分離出直行運動誤差的平移分量和轉動分量. 利用權函數對比分析, 證明了二次相移三點法與先行分離形狀誤差的直線頻域三點法在本質上的同源性和統一性. 實驗結果表明, 該方法可以較好地分離出直行運動誤差和直線形狀誤差.
關鍵詞: 二次相移三點法; 誤差分離技術; 映射矩陣; 反濾波; 直行運動誤差
Abs tra c t: To imp lem en t h igh2p recision and on2linem easu rem en t of linearmo t ion erro rs, a novel erro r sep2 arat ion techn ique (EST ) m ethod nam ed quadrat ic phase sh if t th ree2po in t m ethod w as p ropo sed, w h ich is based on the data recon st ruct ion and inverse f iltering. A cco rding to the p rincip le of quadrat ic phase sh if t, the data f rom th ree p robes are recon st ructed, and the inf luence of fo rm erro r can be elim inated, so the lin2 ear erro r mo t ion can be separated and gained f irst ly on the basis of inverse f iltering. Comparat ive analysis of the w eigh t ing funct ion p roves the homo logy and un itarity betw een the common f requency th ree2po in t m ethod and the p ropo sed m ethod. Sat isfacto ry effect s w ere ach ieved by som e experim en t s.

Ke y w o rds: quadrat ic phase sh if t th ree2po in t m ethod; erro r separat ion techn iques (EST ) ; m app ing m a2 t rix; inverse f iltering; linear mo t ion erro r